The MEMS Module addresses design issues that arise in the micro-world. It models physical phenomena in actuators and sensors plus microfluidic and small piezoelectric devices.
Most MEMS applications are multiphysics by their very nature and usually include electromagnetic-structural, thermal-structural, fluid-structure (FSI), or electromagnetic-fluid interactions. To this end, the MEMS Module provides equations and settings optimized for the single- and coupled-physics modeling that these interactions may require.
The module includes analyses in the stationary and transient domains as well as eigen-frequency, parametric, quasi-static and frequency-response analyses.
Application Examples
- Accelerometers
- Actuators
- Cantilever beams and other switches
- Chemical and biochemical sensors
- DNA chips and lab-on-chips
- Fluid-structure interaction in microchannels
- Heterogeneous two-phase flow in microchannels
- Inkjets
- MEMS acoustic transducers
- MEMS capacitors
- MEMS thermal devices
- Microreactors, micropumps and micromixers
- Microwave power sensors
- MOEMS and VCSELS
- Piezoelectric and piezoresistive devices
- RF MEMS devices
- Sensors
- Surface Acoustic Wave (SAW) sensors and filters