COMSOL API Based Toolbox for the Mixed-Level Modeling of Squeeze-Film Damping in MEMS: Simulation and Experimental Validation
M. Niessner, G. Schrag, J. Iannacci, and G. Wachutka
Institute for Physics of Electrotechnology, Munich University of Technology, Munich, Germany
MEMS Research Unit, Fondazione Bruno Kessler, Povo di Trento, Italy
We present an easy-to-use toolbox for the automated generation of reduced-order mixed-level models for the evaluation of squeeze-film damping in microelectromechanical systems. The toolbox is programmed in JAVA and heavily exploits the functionality provided by the COMSOL API. The results obtained from mixed-level model simulation performed in COMSOL Multiphysics agree very well with ...
K K BIRLA GOA CAMPUS
Spacecrafts have a prime necessity that their temperature be controlled. This paper presents the simulation of a mechanically actuated field effect transistor that is used in a thermal system. It comprises of a composite beam, a piezoelectric substrate and a field effect transistor. The temperature rise causes a deflection in the composite beam thereby causing it to impinge on the piezoelectric ...
In recent years, optical manipulation using optical radiation pressure has been widely studied. In this study, the radiation pressure exerted on various kinds of microscopic objects with different laser beams was evaluated by COMSOL Multiphysics software. By changing beam shapes, microscopic objects can be trapped and rotated. This paper is in Japanese.
Dr. Piotr Kropelnicki
Mu Xiao Jing
Wan Chia Ang
Andrew B. Randles
Institute of Microelectronics, Agency for Science, Technology and Research, Singapore, Singapore
In this research, we performed multiple COMSOL Multiphysics® simulations. We analyzed the dispersion curves of waves in a LAMB wave pressure sensor; simulated a thin metal film in a microbolometer and observed the resulting stress; investigated the thermal behavior of an acoustic wave microbolometer; and modeled the fluid-structure interaction (FSI) for piezoelectric-based energy harvesting from ...
A. Weddemann, A. Auge, F. Wittbracht, C. Albon, and A. Hütten
Department of Physics, Thin Films and Physics of Nanostructures, Bielefeld University, Bielefeld, Germany
In this work, we demonstrate the implementation of the micromagnetic equations for the description of ferromagnetic thin films in COMSOL Multiphysics®. We apply our model to magnetoresistive sensors consisting of several soft ferromagnetic layers and their response to magnetic particles. The magnetization dynamic of the particles needs to be described in a similar manner, though due to size ...
Pryor Knowledge Systems, Inc. (COMSOL Certified Consultant), Bloomfield Hills, Michigan, USA
Materials and their related properties are intrinsically fundamental to the creation, development and solution of viable exploratory models when using numerical analysis software. In many cases, simply determining the location, availability and relative accuracy of the necessary material parameters for the physical behavior of even commonly employed design materials can be very difficult and time ...
Optimization of the Temperature Distribution in a Chemical Microreactor using a Multi-Segment Integrated Thin Film Heater
T.R. Henriksen, S. Jensen, U. Quaade, and O. Hansen
Technical University of Denmark
COMSOL Multiphysics has been used to study the effect of different heater design parameters on the temperature distribution in a chemical microreactor. The primary objective of the simulations has been to optimize the temperature uniformity inside the reaction chamber. In the simulations, special attention has been given to how the number, positions and widths of the heater strips relate ...
Perspectives of Thermo-electro-mechanical Micro Actuators for Micro Switch Applications: Design and Simulation
M. Matmat, M. Al Ahmad, and J. Y. Fourniols
Laboratoire d'Analyse et d'Architecture des Systèmes (LAAS-CNRS), Toulouse, France
In this work, thermo-mechanical simulations employing a 3D finite element analysis (FEA) of a current driven V-shaped actuator is presented. The structure's hot arms consist of polysilicon, which was used as the active material for deflection due to the Joule effect.COMSOL Multiphysics with stationary and parametric solvers was used to calculate the resulting deflection when current is applied. ...
Yokohama National University, Japan
In this presentation, we present our work on optically controlled microfluidic systems. This includes both numerical simulations and experiments.
T. Verdot, and M. Collet
Dept. of Applied Mechanics, FEMTO-ST Institute, Besançon, France
Nowadays, lightweight materials are widely used to reduce weight and increase available space in moving structures such as cars or aircraft. However, they constitute an intense vibrating environment that can strongly affect the operation of embedded micro-transducers such as frequency generators or inertial sensors. To alleviate this problem, we propose the concept of a Micro-Active Suspension ...